by: Palosaari, J. and Juuti, J. and Tyholdt, F. and Østbø, N.P. and Vogl, A. and Poppe, E. and Guðbjörnsson, S. and Ringgaard, E. and Hok, B. and Fagerman, P.-E. and Gløersen, P. and Raeder, H. and Jantunen, H.
Abstract: In this paper, thin film piezoelectric ultrasonic transducers with a two electrode design and various different membrane sizes were manufactured and characterized. The transducers were fabricated on a silicon wafer by chemical solution deposition (CSD) where PZT was deposited with a total thickness of ~2 ¿m. Afterwards, cavities were wet etched underneath the piezoelectric layer creating bending membranes with a total thickness of ~13 ¿m and cavity sizes from 0.056 mm2 to 0.181 mm2. Then the transducers were poled and their electromechanical properties were measured with laser vibrometer. The membranes resonance frequencies and quality factors were measured at ~780-2000 kHz and 70-135, respectively, and effective d33 coefficients from 100-290 nm/V.
